Abstract

A resistive-type temperature sensor based on vanadium complex (VO2(3-fl)) film is reported in this study. Silver electrodes were deposited on the glass substrates in a co-planar structure. A thin film of vanadium complex (VO2(3-fl)) was coated as a temperaturesensing material on the top of the pre-patterned electrodes. The temperature-sensing principle of the sensor was based on the conductivity change of coated sensing element upon heating or cooling processes. The resistance of the temperature sensor, measured at 100 Hz, decreased exponentially with increasing the temperature in the range of 25−80 oC. The overall resistance of the sensor decreases in
3.7−4.5 times. The resistance temperature coefficients of the sensor were in the range of 3.2 to 3.6%. The properties of the sensor studied in this work, make it beneficial to be used in the instruments for environmental monitoring of temperature.

Key words: Vanadium complex, thin film, teperature sensor, resistance